Wafer handler comprising a vision system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Oct 6, 2015
Grant Date -
Oct 4, 2012
app pub date -
Jun 12, 2012
filing date -
Dec 23, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A wafer handler including, a wafer loading station (3) for loading a wafer (1) mounted on a tack film (2); a tensioner (30) for tensioning the tacky film; a picking module (66) for successively picking a plurality of devices from the wafer; a vision system (5, 50) with one or several cameras (50) for capturing a first image of the wafer or of portions of the wafer, the first image showing a plurality of devices, wherein the vision system is arranged for determining from the first image the individual position of a plurality of devices. The wafer handler further includes an additional camera (63) positioned proximate to the picking module (66) and arranged for capturing an second image of a device to be picked, wherein the second image is used for fine adjustment of the wafer so that the device to be picked is centered under the picking module.
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