Method and apparatus for characterizing objects and monitoring manufacturing processes
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United States of America Patent
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Oct 13, 2015
Grant Date -
Jan 31, 2013
app pub date -
Jul 25, 2012
filing date -
Jul 25, 2011
priority date (Note) -
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Abstract
A method of characterizing an object includes determining a depth-wise composition of the object at a measurement site within the object. A property of the object within a region adjacent to the measurement site can, optionally, be estimated based on the determining. Another method of characterizing an object includes disposing at least a portion of an object within a measurement region of a metrology tool, aligning a feature of the object and a location of a designated measurement site within the measurement region relative to each other, and performing a performing a compositional analysis of a portion of the object occupying the measurement site. Various apparatus for performing these methods are also disclosed, as are methods of monitoring manufacturing processes based on these methods.
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