Dual zone template chuck

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United States of America Patent

PATENT NO 9164375
APP PUB NO 20100320645A1
SERIAL NO

12817787

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Abstract

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A template chuck includes multiple zones to provide 1) an imprint bend optimized to provide high curvature and provide contact at middle radius of substrate and/or, 2) separation bend zone with an increased free span zone and high crack angle.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A388 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Byung-Jin Austin, US 194 2163
Ganapathisubramanian, Mahadevan Cedar Park, US 18 268

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