Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units

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United States of America Patent

PATENT NO 9165807
APP PUB NO 20120145074A1
SERIAL NO

13401644

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Abstract

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A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism for transporting the substrates to the treating units. Each cell also has a blowout unit for supplying a clean gas into a transporting space of the main transport mechanism and an exhaust unit for exhausting gas from the transporting space. The blowout unit and the exhaust unit are arranged one over the other in the transporting space to separate the transporting space of each cell from that of another cell.

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Patent Owner(s)

  • SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukutomi, Yoshiteru Kyoto, JP 35 726
Kawamatsu, Yasuo Kyoto, JP 20 260
Mitsuhashi, Tsuyoshi Kyoto, JP 52 716
Morinishi, Kenya Kyoto, JP 28 507
Nagashima, Hiromichi Kyoto, JP 17 226
Ogura, Hiroyuki Kyoto, JP 75 1730

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