Method of generating high quality hole, recess or well in substrate

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United States of America Patent

PATENT NO 9168614
SERIAL NO

13967689

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Abstract

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A method of generating a hole or well in an electrically insulating or semiconducting substrate, a hole or well in a substrate generated by this method, and an array of holes or wells in a substrate generated by the method.

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Patent Owner(s)

Patent OwnerAddress
AGC INC5-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-8405

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chaize, Adrien Hauterive, CH 3 8
Dittmann, Leander Lausanne, CH 22 38
Hoyer, Svend Chavannes-pres-Renens, CH 2 7
Schmidt, Christian Engelberg, CH 142 944

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