E-fuse with hybrid metallization

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United States of America Patent

PATENT NO 9171801
APP PUB NO 20140332924A1
SERIAL NO

14291027

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A structure including a first interconnect including a first line overlying a first via and a second interconnect including a second line overlying a second via. The first line and the second line are co-planar. The first interconnect comprises a first conductor, the first conductor comprises a metal silicide including titanium silicide, cobalt silicide, nickel silicide, tungsten silicide, platinum silicide, molybdenum silicide, tantalum silicide, or some combination thereof. The second interconnect comprises a second conductor, the second conductor comprising copper.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bao, Junjing San Diego, US 99 513
Bonilla, Griselda Fishkill, US 107 1073
Choi, Samuel S Hopewell Junction, US 48 408
Filippi, Ronald G Wappingers Falls, US 99 1178
Lustig, Naftali E Croton on Hudson, US 59 1488
Simon, Andrew H Fishkill, US 104 1611

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