Memory cells, semiconductor devices, systems including such cells, and methods of fabrication
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United States of America Patent
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Nov 3, 2015
Grant Date -
Mar 21, 2013
app pub date -
Sep 16, 2011
filing date -
Sep 16, 2011
priority date (Note) -
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Abstract
A memory cell is disclosed. The memory cell includes a transistor and a capacitor. The transistor includes a source region, a drain region, and a channel region including an indium gallium zinc oxide (IGZO, which is also known in the art as GIZO) material. The capacitor is in operative communication with the transistor, and the capacitor includes a top capacitor electrode and a bottom capacitor electrode. Also disclosed is a semiconductor device including a dynamic random access memory (DRAM) array of DRAM cells. Also disclosed is a system including a memory array of DRAM cells and methods for forming the disclosed memory cells and arrays of cells.
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