Front-side illuminated, back-side contact double-sided PN-junction photodiode arrays
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United States of America Patent
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Nov 3, 2015
Grant Date -
Apr 3, 2014
app pub date -
Sep 28, 2012
filing date -
Nov 1, 2006
priority date (Note) -
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Abstract
The present application is a photodiode detector array for use in computerized tomography (CT) and non-CT applications. Specifically, the present application is a high-density photodiode arrays, with low dark current, low capacitance, high signal to noise ratio, high speed, and low crosstalk that can be fabricated on relatively large substrate wafers. More specifically the photodiode array of the present application is fabricated such that the PN-junctions are located on both the front side and back side surfaces of the array, and wherein the front side PN-junction is in electrical communication with the back side PN-junction. Still more specifically, the present application is a photodiode array having PN-junctions that are electrically connected from the front to back surfaces and which can be operated in a fully depleted mode at low reverse bias.
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