Electrical component and method of manufacturing the same

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United States of America Patent

PATENT NO 9181081
APP PUB NO 20140284729A1
SERIAL NO

13962892

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Abstract

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According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer which includes through holes, and forms a cavity that stores the functional element on the substrate, and a second layer which is formed on the first layer, and closes the through holes. The first layer includes a first film, a second film on the first film, and a third film on the second film. A Young's modulus of the second film is higher than a Young's modulus of the first film and the third film.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Obara, Kei Kawasaki, JP 5 9
Shimooka, Yoshiaki Sagamihara, JP 36 380
Sugizaki, Yoshiaki Fujisawa, JP 265 3059

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