Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer
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United States of America Patent
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Nov 10, 2015
Grant Date -
Apr 23, 2009
app pub date -
Oct 15, 2008
filing date -
Jul 1, 2005
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Abstract
A device for heat treating (annealing) a III-V semiconductor wafer comprises at least one wafer support unit which is dimensioned such that a cover provided above the wafer surface is either spaced without any distance or with a distance of maximally about 2 mm to the wafer surface. A process for heat treating III-V semiconductor wafers having diameters larger than 100 mm and a dislocation density below 1×104 cm−2 is carried out in the device of the invention. SI GaAs wafers produced have an at least 25% increased characteristic fracture strength (Weibull distribution), an improved radial macroscopic and mesoscopic homogeneity and an improved quality of the mechano-chemically polished surface. The characteristic fracture strength is higher than 1900 MPa.
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