Infrared sensor, heat sensing element, and heat sensing method using the same
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United States of America Patent
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Nov 10, 2015
Grant Date -
May 14, 2015
app pub date -
Mar 21, 2014
filing date -
Mar 25, 2013
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Abstract
An infrared sensor includes a heat sensing element in which a first electrode, a dielectric film, and a second electrode are sequentially laminated; and an electric charge detection device. The dielectric film represents antiferroelectricity and has a spontaneous polarization in a predetermined measurement environment. The electric charge detection device calculates an amount of relaxation current flowing by a change of the spontaneous polarization, and senses heat of the heat sensing element based on temperature dependence of the amount of relaxation current.
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