High capacity monitor crystal exchanger utilizing an organized 3-D storage structure
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United States of America Patent
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Nov 10, 2015
Grant Date -
Sep 18, 2014
app pub date -
Mar 15, 2013
filing date -
Mar 15, 2013
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Abstract
An apparatus for monitoring and detecting material deposited onto a substrate during a deposition process in a processing chamber includes a storage structure having a primary axis extending between respective first and second ends and an exterior lateral surface between the first and second ends extending about the primary axis. A plurality of monitor crystals are supported by the storage structure at spaced positions along said exterior lateral surface and in which a drive mechanism advances the storage structure rotatably and axially relative to the primary axis such that at least one monitor crystal is advanced or retracted relative to at least one measuring position. A retained crystal that is advanced to the measuring position can be electrically connected, using a brush contact or other mechanism, in order to excite the crystal using a resonance circuit.
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