Extreme ultraviolet radiation (EUV) pellicle formation apparatus

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United States of America Patent

PATENT NO 9182686
APP PUB NO 20140367248A1
SERIAL NO

13916939

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Spacers arranged on opposite sides of an article to be processed into an EUV pellicle support the article. Plates on opposite ends of the spacer-article combination include respective electrodes. The plates, article, and spacers can be held together with a vacuum retention system. A center hole of each spacer forms a chamber with surfaces engaged by the spacer. A fluid entry extending from an outer surface of each spacer to its center hole allows delivery of fluid to each chamber. Additional spacers can be used to support additional articles. Additional plates and electrodes can also be used.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goldfarb, Dario L Dobbs Ferry, US 61 478

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