Narrow width loadport mechanism for cleanroom material transfer systems
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United States of America Patent
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Nov 10, 2015
Grant Date -
Dec 20, 2012
app pub date -
May 4, 2012
filing date -
May 7, 2011
priority date (Note) -
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Abstract
A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.
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