Rinsing agent, and method for production of hard disk substrate

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United States of America Patent

PATENT NO 9187718
APP PUB NO 20130122786A1
SERIAL NO

13812271

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Abstract

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Provided are a rinsing agent to produce a hard disk substrate free from remaining abrasive grains as well as a pit defect on the surface thereof and a method for production of a hard disk substrate using such a rinsing agent. A rinsing agent of the present invention is rinsing solution containing colloidal silica as abrasive grains. Letting that the colloidal silica abrasive grains have a concentration C and an average grain size R (C and R are represented in weight % and nm, respectively), the concentration C and the average grain size R of the colloidal silica abrasive grains have a relation matching the following Expression (1):

description='In-line Formulae' end='lead'12.2C+18.2  (1).description='In-line Formulae' end='tail'

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Patent Owner(s)

Patent OwnerAddress
TOYO KOHAN CO LTD18-1 HIGASHI-GOTANDA 2-CHOME SHINAGAWA-KU TOKYO 141-8260
KOHAN KOGYO CO LTDJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Kazutaka Yamaguchi, JP 18 51
Iwamoto, Nobuhiro Yamaguchi, JP 2 0
Kotani, Ryuji Yamaguchi, JP 1 0
Mukai, Nobuaki Yamaguchi, JP 19 28

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