Apparatus and method for calibrating extreme ultraviolet spectrometer

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United States of America Patent

PATENT NO 9188484
APP PUB NO 20150192463A1
SERIAL NO

14225698

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Abstract

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Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.

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Patent Owner(s)

Patent OwnerAddress
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY5 HWARANG-RO 14-GIL SEONGBUK-GU SEOUL 02792 02792

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Woon Jo Gyeonggi-do, KR 4 8
Chun, Myung Suk Seoul, KR 6 7
Jhon, Young Min Seoul, KR 38 117
Kim, Jae Hun Seoul, KR 177 585
Kim, Sun Ho Seoul, KR 134 736
Kim, Yong Soo Seoul, KR 94 847
Lee, Seok Seoul, KR 138 528
Lee, Taik Jin Seoul, KR 13 66
Park, Min Chul Seoul, KR 27 131
Seo, Min Ah Seoul, KR 11 43
Woo, Deok Ha Seoul, KR 38 103

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