Apparatus and method for measuring three-dimensional objects

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United States of America Patent

PATENT NO 9194697
APP PUB NO 20130076895A1
SERIAL NO

13680861

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is provided a form measuring apparatus including: a projection section configured to project a plurality kinds of patterns onto a measuring object in sequence, the plurality kinds of patterns having a common repetitive structure and differing in phase; an imaging section configured to acquire an image data set by taking an image of the measuring object every time each of the plurality kinds of patterns is projected onto the measuring object; a selecting section configured to select a data set as an adequate data set from the acquired image data set, the data set concerning an identical area on the measuring object, and all data in the set falling within an effective brightness range; and a form calculating section configured to find a form of the area as a basis of acquiring the adequate data on the measuring object, based on the selected adequate data set.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Hiroshi Yokohama, JP 239 2886

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