Terahertz tunable filter with microfabricated mirrors

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United States of America Patent

PATENT NO 9195048
SERIAL NO

14223454

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Abstract

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A terahertz (THz) imaging device includes a tunable filter and a focal plane array (FPA) for receiving selected optical wavelengths of light. The tunable filter includes: (a) a first mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by a gridded cell structure, (b) a second mirror comprised of a thick silicon substrate and a thin silicon membrane, in which the thin silicon membrane is separated from the thick silicon substrate by another gridded cell structure, and (c) a variable gap disposed between the first and second mirrors. The gridded cell structure may have a hexagonal shape, a square shape, a rectangular shape, a triangular shape or a rhombus-like shape.

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Patent Owner(s)

  • HARRIS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kowarz, Marek W Henrietta, US 69 1810
Newman, Jeffrey Daniel Pittsford, US 5 22

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