Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method

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United States of America Patent

PATENT NO 9195144
APP PUB NO 20110211185A1
SERIAL NO

13059057

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Abstract

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A spectral purity filter is configured to allow transmission therethrough of extreme ultraviolet (EUV) radiation and to refract or reflect non-EUV secondary radiation. The spectral purity filter may be part of a source module and/or a lithographic apparatus.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banine, Vadim Yevgenyevich Deurne, NL 222 2858
Jak, Martin Jacobus Johan Eindhoven, NL 74 522
Soer, Wouter Anthon Nijmegen, NL 59 251
Van, Herpen Maarten Marinus Johannes Wilhelmus Heesch, NL 136 980
Yakunin, Andrei Mikhailovich Eindhoven, RU 46 326

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