Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

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United States of America Patent

PATENT NO 9195152
APP PUB NO 20110164237A1
SERIAL NO

13119895

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Abstract

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A transmissive spectral purity filter is configured to transmit extreme ultraviolet radiation. The spectral purity filter includes a filter part having a plurality of apertures configured to transmit extreme ultraviolet radiation and to suppress transmission of a second type of radiation. Each aperture has been manufactured by an anisotropic etching process.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jak, Martin Jacobus Johan Eindhoven, NL 74 524
Kettelarij, Hendrik Jan Eindhoven, NL 8 14
Kuijpers, Petrus Elizabeth Maria Bergeijk, NL 1 0
Mathew, Denny Eindhoven, NL 19 108
Soer, Wouter Anthon Nijmegen, NL 59 251
Van, Den Heuvel Fredericus Christiaan Waalre, NL 3 12
Yakunin, Andrei Mikhailovich Eindhoven, NL 46 328

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