Ion beam sample preparation apparatus and methods
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United States of America Patent
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Nov 24, 2015
Grant Date -
Nov 13, 2014
app pub date -
Jul 27, 2014
filing date -
Jul 27, 2012
priority date (Note) -
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Abstract
Ion beam sample preparation apparatus and methods are described. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam. The apparatus may also include an instrument controller responsive to the state of the apparatus and to the condition of the sample and is operable to control the preparation of the sample.
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