Importance

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Abstract

A multiplicity of wafer-type workpieces are buffer stored in a device having,

a frame,at least two transport elements which each circulate in a vertical direction around an upper and a lower deflection device connected to the frame and are provided, at uniform intervals, with a multiplicity of bearing areas for the horizontal mounting of workpieces, wherein at least one of the deflection devices of each transport element is driven and a free space is situated between the transport elements,a loading position between the upper deflection devices at which a workpiece can be placed onto corresponding bearing areas, anda stationary removal device below the loading position, comprising a horizontal transport device, the first end of which lies within the free space between the transport elements. The invention also relates to a method for buffer-storing a multiplicity of wafer-type workpieces using the abovementioned device.

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First Claim