Holding and rotary driving mechanism for flat objects

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9202725
APP PUB NO 20080017225A1
SERIAL NO

11490950

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate holding and rotary driving mechanism, e.g., for a cleaning chamber with vertical orientation of the wafer, that is comprised of a three-armed spider which is rotatingly installed on the outer side of the cleaning chamber and rotatingly supports on the outer ends of its arms outer shafts with eccentrically arranged inner shafts. The inner shafts pass through the outer shafts into the cleaning chamber where they support contact rollers, while the opposite ends of the inner shafts support gears driven into rotation by a synchronous belt. The contact rollers can be moved apart for insertion or removal of wafers from and into the chamber. This is achieved by turning the spider with eccentric inner shafts in one or another direction.

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Patent Owner(s)

  • PLANAR SEMICONDUCTOR, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Christov, Harry Campbell, US 7 35
Erez, Shmuel San Jose, US 24 1019
Randhawa, Rubinder S Dublin, US 6 19
Sajjad, Basha Pleasanton, US 4 75

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