Process for fabricating nanowire arrays
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United States of America Patent
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Dec 1, 2015
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app pub date -
Jul 28, 2014
filing date -
Apr 14, 2008
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Abstract
A process is provided for etching a silicon-containing substrate to form nanowire arrays. In this process, one deposits nanoparticles and a metal film onto the substrate in such a way that the metal is present and touches silicon where etching is desired and is blocked from touching silicon or not present elsewhere. One submerges the metallized substrate into an etchant aqueous solution comprising HF and an oxidizing agent. In this way arrays of nanowires with controlled diameter and length are produced.
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