Ion bombardment treatment apparatus and method for cleaning of surface of base material using the same

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United States of America Patent

PATENT NO 9211570
SERIAL NO

13697710

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Abstract

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In an ion bombardment treatment apparatus (1A) and a cleaning method, base materials (W) to be treated are held by a work table (11) so as to be placed between a filament (3) and an anode (4) in a vacuum chamber (2), and a discharge power supply (5) which can generate a glow discharge upon the application of a potential difference between the filament (3) and the anode (4) is insulated from the vacuum chamber (2). In the ion bombardment treatment apparatus (1A) and the cleaning method, the efficiency of the cleaning of a base material can be improved and a power supply can be controlled stably.

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Patent Owner(s)

  • KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.);KOBE STEEL, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adachi, Shigeto Takasago, JP 40 219
Fujioka, Koumei Takasago, JP 3 10
Goto, Naoyuki Takasago, JP 78 1362
Nomura, Homare Takasago, JP 5 28

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