Silicon single crystal pulling device and graphite member used therein

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United States of America Patent

PATENT NO 9212431
APP PUB NO 20080078322A1
SERIAL NO

11863894

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Abstract

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A graphite member utilized in a pulling device for pulling a silicon single crystal is provided. An edge part of the graphite member is rounded off which is exposed to a reactive gas. The graphite member may comprise: a plate part having a thickness of ‘t’ wherein a curvature radius of ‘r’ satisfies the formula: t/8≦r≦t/4.

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Patent Owner(s)

Patent OwnerAddress
SUMCO TECHXIV CORPORATIONOMURA-SHI NAGASAKI 856-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawazoe, Shinichi Hiratsuka, JP 20 108
Kubota, Toshimichi Hiratsuka, JP 38 306
Narushima, Yasuhito Hiratsuka, JP 41 147
Ogawa, Fukuo Hiratsuka, JP 28 104
Tomonaga, Tsuneaki Hiratsuka, JP 3 8

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