Thermal treatment apparatus and thermal treatment method
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United States of America Patent
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Dec 15, 2015
Grant Date -
Oct 25, 2012
app pub date -
Feb 8, 2012
filing date -
Feb 10, 2011
priority date (Note) -
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Abstract
In a loading area below a vertical furnace of a thermal treatment apparatus, a gas stream flows along a first direction from one side to the other side of the loading area into a first evacuation opening provided in the other side of the loading area. A thermal evacuation part is located, along the first direction, between a first evacuation opening and an upstream end of a substrate holding member located at an unload position that is located between the one side and the other side of the loading area. The thermal evacuation part includes a second evacuation opening that is arranged to oppose at least an upper part of the substrate holding member located at the unload position and evacuates an environment around the substrate holding member located at the unload position.
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