Apparatus and method for high-speed phase shifting for interferometric measurement systems
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United States of America Patent
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Dec 22, 2015
Grant Date -
Nov 20, 2014
app pub date -
Aug 4, 2014
filing date -
Feb 23, 2009
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Abstract
Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

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- 15 United States
- 10 France
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Patent Owner(s)
Patent Owner | Address | |
---|---|---|
DIMENSIONAL PHOTONICS INTERNATIONAL INC | WILMINGTON MASSACHUSETTS 01887 |
International Classification(s)
- G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....
- G06T:IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....
- G03H:HOLOGRAPHIC PROCESSES OR APPARATUS
- G06K:RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD ....

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Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Dillon, Robert F | Bedford, US | 43 | 923 |
Fillion, Timothy I | Bedford, US | 13 | 238 |
Judell, Neil H K | Newton, US | 12 | 178 |
Singh, Gurpreet | Providence, US | 141 | 869 |
Wallace, Nathan E | Windham, US | 6 | 7 |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 22, 2027 |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
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