Compliant dielectric layer for semiconductor device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 9219054
SERIAL NO

14147237

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Abstract

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Systems, apparatuses, and methods provided for semiconductor devices and integrated circuit (IC) packages that include compliant dielectric layers. In a through silicon via interposer or substrate, a compliant dielectric material may be added to a surface of silicon material body to form a compliant dielectric layer. The compliant dielectric layer provides a thermal buffer and a stress buffer for a resulting IC package. The compliant dielectric material may be selected such that the coefficient of thermal expansion of the compliant dielectric material approximately matches the coefficient of thermal expansion of the circuit board on which the IC package is mounted. The compliant dielectric material may be selected such that it has a deformability that is greater than the silicon material body. Multiple sub-layers of compliant dielectric material may be used.

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Patent Owner(s)

  • BROADCOM CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Khan, Rezaur Rahman Rancho Santa Margarita, US 77 1605
Zhao, Sam Ziqun Irvine, US 143 3097

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