Laminar flow plating rack

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United States of America Patent

PATENT NO 9222191
APP PUB NO 20120100287A1
SERIAL NO

13278068

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Importance

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Abstract

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A plating apparatus includes a vessel and a rack operable to be positioned inside the vessel. The rack includes a number of mandrels including a number of substrate mounting surfaces. The number of mandrels is non-revolving with respect to the rack. The rack further includes a number of gears coupled with the number of mandrels. A partition separates the number of gears from the number of mandrels. A diffuser is positioned below the rack. The diffuser is operable to produce a substantially uniform laminar flow of a fluid from a bottom to a top of the vessel. Thus, the laminar flow may reduce dead zones in the bath and remove defect-causing particles and gases away from the substrate.

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Patent Owner(s)

Patent OwnerAddress
SEAGATE TECHNOLOGY LLC920 DISC DRIVE SCOTTS VALLEY CA 95066

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wong, Samuel Kah Hean Johor, MY 12 103

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