Sensor and method for manufacturing a sensor

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United States of America Patent

PATENT NO 9227837
APP PUB NO 20150232327A1
SERIAL NO

14609737

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Abstract

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A sensor includes: a substrate, a microelectromechanical structure, and a decoupling structure. The decoupling structure is anchored on the substrate, and the microelectromechanical structure is anchored on the decoupling structure. The microelectromechanical structure and the decoupling structure are movable in relation to the substrate. The decoupling structure is situated between the microelectromechanical structure and the substrate.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Reinmuth, Jochen Reutlingen, DE 139 640

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