Substrate treating apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9230834
APP PUB NO 20120156380A1
SERIAL NO

13401617

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukutomi, Yoshiteru Kyoto, JP 35 726
Kawamatsu, Yasuo Kyoto, JP 20 260
Mitsuhashi, Tsuyoshi Kyoto, JP 52 716
Morinishi, Kenya Kyoto, JP 28 507
Nagashima, Hiromichi Kyoto, JP 17 226
Ogura, Hiroyuki Kyoto, JP 75 1729

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 5, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00