Three dimensional memory device having well contact pillar and method of making thereof

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United States of America Patent

PATENT NO 9230972
SERIAL NO

14491026

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Abstract

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A monolithic three dimensional memory device includes a semiconductor substrate having a major surface and a doped well region of a first conductivity type extending substantially parallel to the major surface of the semiconductor substrate, a plurality of NAND memory strings extending substantially perpendicular to the major surface of the semiconductor substrate, and a plurality of substantially pillar-shaped support members extending substantially perpendicular to the major surface of the semiconductor substrate, each support member including an electrically insulating outer material surrounding an electrically conductive core material that extends substantially perpendicular to the major surface of the semiconductor substrate and electrically contacting the doped well region.

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Patent Owner(s)

  • SANDISK TECHNOLOGIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Honma, Ryoichi Yokkaichi, JP 12 1018
Mizutani, Yuki San Jose, US 34 1038
Ogawa, Hiroyuki Yokkaichi, JP 294 5374
Shimabukuro, Seiji Yokkaichi, JP 33 689
Toyama, Fumiaki Cupertino, US 66 1499

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