Monolithically applied heating elements on saw substrate

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United States of America Patent

PATENT NO 9232315
APP PUB NO 20120234818A1
SERIAL NO

13065177

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Abstract

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A surface acoustic wave (SAW) device comprising a piezoelectric substrate having a working surface with an active zone capable of propagating an acoustic wave on said working surface; at least one interdigital transducer on the working surface, having interdigital fingers aligned in the active zone for inducing or receiving surface acoustic waves in the active zone; and a heating element on the working surface; wherein the transducer, heating element and preferably a temperature sensor are monolithically formed on the substrate.

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Patent Owner(s)

Patent OwnerAddress
MICROSEMI CORP - RF SIGNAL PROCESSING90 WOLCOTT RD SIMSBURY CT 06070

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adler, Joseph V New Milford, US 2 37
Dufilie, Pierre A Vernon, US 7 32
Martin, Tom A Canton, US 3 20

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