Vacuum control valve and vacuum control apparatus
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United States of America Patent
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-
Jan 12, 2016
Grant Date -
Nov 28, 2013
app pub date -
Aug 1, 2013
filing date -
Feb 2, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.
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