Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
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United States of America Patent
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Jan 12, 2016
Grant Date -
Sep 19, 2013
app pub date -
May 3, 2013
filing date -
Feb 15, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node.
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