Spectroscopic measurement apparatus capable of quickly measuring a spectral characteristic
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United States of America Patent
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Jan 12, 2016
Grant Date -
May 9, 2013
app pub date -
Oct 23, 2012
filing date -
Nov 9, 2011
priority date (Note) -
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Abstract
A spectroscopic measurement apparatus includes: a wavelength tunable interference filter including a fixed substrate having a fixed reflection film, a movable substrate having a movable reflection film, and an electrostatic actuator that changes a gap value of an inter-reflection-film gap by applying a voltage to bend the movable substrate; a detector that detects a light level; and a controller that measures a spectral characteristic of light under measurement. The controller includes a filter driver that applies a drive voltage to the electrostatic actuator to change the inter-reflection-film gap, a detected light level acquisition unit that acquires light levels detected by the detector, and a target light level acquisition unit that acquires a light level corresponding to an oscillation center of the movable substrate as a target light level based on how the detected light level transitions and a natural oscillation cycle that the movable substrate has.
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