Defect inspection device, defect inspection method, and defect inspection program
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United States of America Patent
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Jan 19, 2016
Grant Date -
Dec 5, 2013
app pub date -
May 28, 2013
filing date -
May 30, 2012
priority date (Note) -
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Abstract
A defect inspection device according to one aspect of the present invention includes a light source, a detector that receives light from an illuminated region of a sample, a stage that changes a relative position between light from the light source and the sample in order to sequentially inspect a plurality of unit inspection regions, a comparator that compares a detection signal output from the detector with a threshold according to scanning in the stage, a mask position setting unit that sets a common position of the plurality of unit inspection regions as a mask position in order to mask the common position when the plurality of unit inspection regions are sequentially inspected, and a defect detection unit that detects a defect based on a comparison result in the comparison unit in another region than the mask position.
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