Imprint method and imprint apparatus

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United States of America Patent

PATENT NO 9240336
APP PUB NO 20150170922A1
SERIAL NO

14193705

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Abstract

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According to one embodiment, an imprint method is provided. In the imprint method, minute objects adhering to a shot of a substrate, on which imprinting is next performed, are removed after delivering the substrate to the interior of an imprint apparatus and before dropping a resist onto the substrate. Thereafter, a resist is dropped onto the shot. Further, a template that is an original plate having a concave-convex pattern is brought into contact with the resist to form a resist pattern on the substrate according to the concave-convex pattern.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takakuwa, Manabu Suzuka, JP 34 111

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