Carbon nanotube semiconductor devices and deterministic nanofabrication methods

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United States of America Patent

PATENT NO 9240552
APP PUB NO 20140034906A1
SERIAL NO

13977219

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Abstract

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Embodiments of the invention provide transistor structures and interconnect structures that employ carbon nanotubes (CNTs). Further embodiments of the invention provide methods of fabricating transistor structures and interconnect structures that employ carbon nanotubes. Deterministic nanofabrication techniques according to embodiments of the invention can provide efficient routes for the large-scale manufacture of transistor and interconnect structures for use, for example, in random logic and memory circuit applications.

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  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clendenning, Scott B Portland, US 82 826
Michalak, David J Portland, US 73 1672
Wong, Lawrence D Beaverton, US 24 362

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