Method for manufacturing water-repellent film, and substrate, nozzle plate, ink jet head, and ink jet recording device
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United States of America Patent
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Jan 26, 2016
Grant Date -
Oct 29, 2015
app pub date -
Jul 6, 2015
filing date -
Jan 9, 2013
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Abstract
The present invention provides a method for manufacturing a water-repellent film, including an adhesion precursor film forming step of forming, on a substrate, an adhesion precursor film mainly of a Si—O bond with hydrogen directly bonded to Si; an irradiating step of irradiating the adhesion precursor film with excitation energy to increase an OH group present on a surface of the adhesion precursor film to thereby change the adhesion precursor film into an adhesion reinforcing film; and an organic film coating step of coating the adhesion reinforcing film with an organic film by using a silane coupling agent, wherein a content of the hydrogen directly bonded to Si in the adhesion precursor film is 1.0×1017 atoms/cm2 or more in terms of a H2 molecule.
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