Apparatus for producing laminated body
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United States of America Patent
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Jan 26, 2016
Grant Date -
Sep 27, 2012
app pub date -
Mar 7, 2012
filing date -
Mar 23, 2011
priority date (Note) -
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Abstract
An apparatus is provided that can stably produce a laminated body including a vapor-deposited polymer film having a predetermined composition and thickness on a film substrate. The apparatus includes: a film substrate supply means 46 that supplies a film substrate 15 on an outer peripheral surface of a rotary drum 35 in a vacuum chamber 24; a plurality of blowoff members 64 positioned around the rotary drum 35, each of the plurality of blowoff members including a vapor outlet 66 opening inside the vacuum chamber 24 to the outer peripheral surface of the rotary drum 35 and an inner space constituting a deposition chamber; and at least one monomer vapor supply means 84 arranged to supply plural kinds of monomer vapor into the deposition chamber and blowoff the plural kinds of monomer vapor from the vapor outlet of each of the plurality of blowoff members.
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