Imaging apparatus and method
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United States of America Patent
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Feb 2, 2016
Grant Date -
Nov 12, 2009
app pub date -
Jun 28, 2007
filing date -
Jun 28, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
Apparatus for inspecting an article comprising: a controller configured to generate a drive signal having a periodic amplitude variation; a source, the source being operable by the controller to emit a source beam thereby to irradiate an article, the source beam comprising a beam of electromagnetic radiation having a periodic amplitude variation corresponding to that of the drive signal; and a detector, the detector being configured to detect a portion of the source beam that has been transmitted through at least a portion of the article, and to generate a detector signal having an amplitude variation corresponding to the amplitude variation of said portion of the source beam, the controller being further configured to generate a difference value corresponding to a difference between the amplitude of the detector signal and the amplitude of a reference signal.
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