Device manufacturing apparatus and device manufacturing method

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United States of America Patent

PATENT NO 9256231
APP PUB NO 20110059621A1
SERIAL NO

12876038

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Abstract

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An apparatus for manufacturing a device comprises a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device, a controller configured to control the temperature regulator, and a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yoshida, Tomohiko Utsunomiya, JP 14 105

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