Open plasma lamp for forming a light-sustained plasma

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United States of America Patent

PATENT NO 9263238
SERIAL NO

14670210

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Abstract

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An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Sunnyvale, US 73 532
Chimmalgi, Anant San Jose, US 31 217
Delgado, Gildardo Livermore, US 34 227
Derstine, Matthew Los Gatos, US 29 281
Shchemelinin, Anatoly Pleasanton, US 52 507
Wilson, Lauren San Jose, US 15 138

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