Apparatus for detecting organic compounds and apparatus for manufacturing display device using the same
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United States of America Patent
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Feb 23, 2016
Grant Date -
Oct 2, 2014
app pub date -
Mar 26, 2014
filing date -
Mar 27, 2013
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Abstract
An apparatus for detecting an organic compound and an apparatus for manufacturing a display device, the apparatus for detecting an organic compound including an infrared light emitting unit that irradiates infrared rays toward a gas-phase organic compound used as a process gas in an atmospheric pressure equipment; a first window that separates the organic compound from the infrared light emitting unit; an infrared detection unit that measures an infrared absorbance of the organic compound; and a second window that separates the organic compound from the infrared detection unit, wherein infrared absorption regions of the first window and the second window are different from an infrared absorption region of the organic compound.
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