Reactor with accurate temperature control

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United States of America Patent

PATENT NO 9268346
APP PUB NO 20090258413A1
SERIAL NO

12422575

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed herein is a reactor including, a plurality of reaction regions, and a plurality of heaters, each arranged in each of the reaction regions, wherein the heater including a semiconductor heat generating element and a semiconductor temperature detecting element and being capable of independent temperature control, and the temperature detecting element having a heat conduction region of metal thin film in its surrounding region.

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Patent Owner(s)

  • SONY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anaguchi, Takanori Kanagawa, JP 6 9
Kanai, Nobuhiro Kanagawa, JP 2 12
Moriwaki, Toshiki Kanagawa, JP 52 397

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