XYθ precision alignment platform
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 1, 2016
Grant Date -
Nov 7, 2013
app pub date -
Jul 5, 2013
filing date -
May 3, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A xyθ precision alignment platform is provided. The alignment platform includes three power units and three moving platform. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrangement disposed between the second moving platform and the third moving platform to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrangement laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully