Particle beam device and method for processing and/or analyzing a sample
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United States of America Patent
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Sep 27, 2016
Grant Date -
Aug 16, 2012
app pub date -
Jan 6, 2012
filing date -
Jan 6, 2012
priority date (Note) -
Withdrawn
status (Latency Note)
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Abstract
A particle beam device and method for processing and/or for analyzing a sample are provided. A sample carrier is arranged at a first position, in which a sample surface is oriented parallel to a first beam axis of a first particle beam column. The sample carrier is rotatable from the first position into a second position, in which the sample surface is oriented perpendicular to a second beam axis of a second particle beam column. The first and second beam axes intersect at a coincidence point. In the first position a distance between the coincidence point and the first particle beam column is greater than a distance between the sample surface and the first particle beam column. In the second position a distance between the coincidence point and the second particle beam column is greater than a distance between the sample surface and the second particle beam column.
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