Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image
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United States of America Patent
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Mar 22, 2016
Grant Date -
Jun 19, 2014
app pub date -
Sep 16, 2013
filing date -
Mar 5, 2010
priority date (Note) -
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Abstract
The present invention relates to customizing individual workpieces, such as chip, flat panels or other electronic devices produced on substrates, by direct writing a custom pattern. Customization can be per device, per substrate, per batch or at some other small volume that makes it impractical to use a custom mask or mask set. In particular, it relates to customizing a latent image formed in a patterning sensitive layer over a substrate, merging standard and custom pattern data to form a custom pattern used to produce the customized latent image. A wide variety of substrates can benefit from the technology disclosed.
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